Selective wet oxidation of AlAsSb alloys on GaAs

نویسندگان

چکیده

In this paper, the oxidation of thin low-Sb-containing AlAsSb layers quasi-lattice matched on GaAs substrates is studied in detail since, compared to AlGaAs, these alloys had prospects being laterally oxidized at a faster rate, lower process temperatures, and with reduced volume change. Combining monitoring data kinetics anisotropy atomic-force-microscopy surface measurements enables us establish optimal composition range parameters that lead nearly isotropic Sb-segregation-free oxidations. The study also shows strain plays central role triggering detrimental Sb segregation.

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ژورنال

عنوان ژورنال: AIP Advances

سال: 2021

ISSN: ['2158-3226']

DOI: https://doi.org/10.1063/5.0073200